Thermionics RC Series 3 kW Multiple Crucible Linear e-Gun RC系列 多坩堝 線性電子槍 真空鍍膜
RC Series 3 kW Multiple Crucible Linear e-Gun
Thermionics research capacity series, 3 kW multiple-crucible linear e-Guns, provides enhanced beam stability and efficient XY sweep with full crucible coverage and are available with automatic positioning with the auto-indexer, sold separately.
Features
- True XY sweep with full crucible coverage
- Sweep coils included with source
- Enhanced beam collimation
- Plug-in emitter module
- Enhanced high-stability cooling
- Cross-contamination shielding
- Rugged design
- Optional auto-indexer
Specifications
| Operating Pressure | Below 5 x 10-5?Torr is desirable for best operation |
| Beam Voltage | 4,000 VDC |
| Beam Current | 0–750 mA continuously variable |
| Maximum Power | 3 kW |
| Cooling Water | 1.5 gpm |
| Pressure Differential | 25 psi minimum |
| Maximum Bakeout Temperature |
230°C (446°F) |
| Crucible Volume | 2.24 cc x 3, 4 or 5 crucibles |
