RCRF Series 3 kW Rod-Fed e-Gun 3kW RCRF系列電子槍 真空鍍膜

RCRF Series 3 kW Rod-Fed e-Gun 3kW RCRF系列電子槍 真空鍍膜

RCRF Series 3 kW Rod-Fed e-Gun

The 3 kW RCRF Series rod-fed e-Gun uses evaporant source material in the form of a rod up to 3/8″ in diameter, which is fed continuously into the crucible using an external linear feedthrough. Film thickness may be controlled using a rate monitor and are available mounted on various flanges.

UHV Compatible

Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11?Torr.

Mounting and Configurations

  • The 3 kW rod-fed e-Gun may be mounted and operated in any orientation, including upside down (which is material dependent)
  • The rod-fed e-Gun shown in the photo can fit through a 2.5″ O.D. tube
  • An optional cryoshroud to surround the e-Gun is available
  • Multiple rod-fed e-Guns can be mounted side-by-side
  • Custom designs are available, please consult the factory

Knudsen Cell Replacement

e-Guns can evaporate difficult materials, ie.: carbon, niobium, and silicon.

A rod-fed e-Gun, complete with all the necessary utility and mechanical feedthroughs, installed on a 4.5″ O.D. ConFlat mounting flange, is available as a direct replacement for existing Knudsen cell furnaces on Varian/Intevac, Perkin-Elmer, Riber, EPI and VG systems.

Specifications

?Feature ?Specification
Operating Pressure Below 5 x 10-5?Torr is desirable for best operation; fully UHV compatible design
Beam Voltage 4,000 V
Beam Current 0–750 mA
continuously variable
Maximum Power 3 kW @ 4 kV
Cooling Water 1/2 gpm
Maximum Bakeout
Temperature		 230°C (446°F)
Feedthrough
Requirements		 Two 7 kV 50 A
Crucible Volume 1/4″ or 3/8″ diameter rod
e-Gun Size 2.25″ diameter x 2.95″ L

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