Our High-Efficiency Hanks HM2 e-Guns™ provide patented and award winning modular magnet beam focusing system with enhanced beam collimation, eliminating beam curl.
HM2 e-Guns™ are also 2/3 the size of standard e-Guns and 350% more efficient magnetically.
我們的高效Hanks HM2e-Guns™提供獲得專利和屢獲殊榮的模塊化磁束聚焦系統,具有增強的光束準直性,消除了光束卷曲。
HM2e-Guns™的尺寸也是標準e-Guns的2/3,磁性效率提高了350%。
Our High-Efficiency Hanks HM2 e-Guns™ provide patented and award winning modular magnet beam focusing system with enhanced beam collimation, eliminating beam curl. Our innovative Hanks HM2 Hydra design consists of one (1) or two (2) compact array(s) of crucibles and emitters which translate linearly with respect to each other to provide for the co-deposition of up-to six different materials simultaneously.
HM2 e-Guns™ are also 2/3 the size of standard e-Guns and 350% more efficient magnetically.
我們的高效Hanks HM2e-Guns™提供獲得專利和屢獲殊榮的模塊化磁束聚焦系統,具有增強的光束準直性,消除了光束卷曲。我們創新的Hanks HM2Hydra設計由一(1)或兩(2)個緊湊的坩堝和發射器陣列組成,它們彼此線性平移,可同時提供多達六種不同材料的共沉積。
HM2e-Guns™的尺寸也是標準e-Guns的2/3,磁性效率提高了350%。
Features:
- Optimized emitter and sweep coil assemblies
- Eliminations of pole pieces – vertically mounted magnets results in less magnetic flux
- 0-200 Hz sweep, repeatable, uniform evaporation, no “tunneling” and source material eruptions
- Precise and stable evaporation rates as low as 1-2 A/sec
- 35% smaller than traditional evaporation sources with equivalent volume, evaporation rate and power capacity
- ?Available in HV [2×10-9?Torr] and UHV [2×10-11?Torr]
- Ideal for sequential or co-evaporation
- Power Supplies, Crucible Liners and other Accessories available
特征:
優化的發射器和掃描線圈組件
消除磁極片——垂直安裝的磁鐵導致磁通量減少
0-200Hz掃頻,可重復,均勻蒸發,無“隧道效應”和源物質噴發
精確穩定的蒸發速率低至1-2A/sec
比傳統蒸發源小35%,具有同等體積、蒸發率和功率容量
有高壓[2×10-9Torr]和特高壓[2 x 10-11Torr]兩種
非常適合順序蒸發或共蒸發
提供電源、坩堝襯里和其他配件
Models:
- Single— 7 cc to 156 cc single crucible / 1 emitter – 6-20 kW
- Single Rotary— 7 cc to 25 cc – 4 crucible / 1 emitter – 6 & 10 kW
- Twin™— 10 cc, 15 cc, 40 cc – 2?crucible / 2 emitter – 10 & 15 kW
- Triad™?— 10 cc, 15 cc, 40 cc – 3 crucible / 3 emitter – 6 & 10 kW
- Quadra— 10 cc, 15 cc, 40 cc – 4 crucible / 4 emitter – 6 & 10 kW
- Hydra-1™—?Single array of 5 crucibles / 1-3 emitters (see Hydra description below for more details)
- Hydra-2™—?Dual array of 5 crucibles / 1-3 emitters, totaling 10 crucibles / 2-6 emitters (see Hydra description below for more details)
Hanks HM2 e-Guns are manufactured and protected under one or more of the following patents: 4,835,789; 4,891,821; 4,947,404
Hanks HM2 Hydra e-Gun™
Our innovative Hanks HM2 Hydra design consists of one (1) or two (2) compact array(s) of crucibles and emitters which translate linearly with respect to each other to provide for the co-deposition of up-to six different materials simultaneously.
The Hydra configuration’s efficient utilization of space allows for four (4) different combinations of six crucibles and up to forty-two permutations of two-metal combinations, are available for co-deposition in a single vacuum pumpdown.
The Hydra eliminates adjacent source interactions without complex beam directions and bulky field shunting components. Thus, the co-evaporation design allows close source proximity for uniform coating and material interaction. Additionally, individual water cooling for each source prevents steam build-up and the inclusion of separate sweep coils for each source and promotes the total independence of the operation parameters of each source from the adjacent source.
Hanks HM2Hydra電子槍™
我們創新的Hanks HM2Hydra設計由一(1)或兩(2)個緊湊的坩堝和發射器陣列組成,它們彼此線性平移,可同時提供多達六種不同材料的共沉積。
Hydra配置對空間的有效利用允許六個坩堝的四(4)種不同組合和兩種金屬組合的多達四十二種排列,可在單個真空泵中進行共沉積。
Hydra消除了相鄰源的相互作用,而無需復雜的波束方向和笨重的場分流組件。因此,共蒸發設計允許接近源,以實現均勻的涂層和材料相互作用。此外,每個水源的單獨水冷可以防止蒸汽積聚,并為每個水源配備單獨的掃掠線圈,從而促進每個水源的運行參數與相鄰水源的完全獨立。
Hydra-1 & 2?Specifications
Feature | 10 kW Model | 15 kW Model |
Maximum Power | 10 kW | 15 kW |
Crucible volume | 10/15 cc | 40 cc |
Emission voltage | 10 kV | 10 kV |
Emission current | 0 to 1.0 A | 0 to 1.5 A |
Filament | 700 W | 700 W |
E-beam deflection | 220° | 220° |
Beam spot size | .25″ diameter | .25″ diameter |
Evaporation rate (for aluminum) | 1 gm/min at 10 kW 3.6 microns at 25 cm | 1.5 gm/min at 15 kW 50,000 ? min |
X and Y sweep | Hyper-Unimelt Sweep (0-200 Hz) | Hyper-Unimelt sweep (0-200 Hz) |
Water | 3.0 gpm/crucible, common return (up to 30 gpm) | 3.0 gpm/crucible, common return (up to 30 gpm) |
Crucible material | OFE copper | OFE copper |
Bakeout temp | 230°C (446°F) | 230°C (446°F) |
e-Gun size–single array | 6.25″ x 5.5″ x 15″ | 6.25″ x 5.75″ x 15″ |
e-Gun size–double array | 6.25″ x 11″ x 15″ | 6.25″ x 11.5″ x 15″ |