Thermionics HCL e-Gun™ Motorized Z Series Crucible Pocket Indexing Evaporation Source HCL系列多坩堝蒸發源

Thermionics HCL e-Gun™ Motorized Z Series Crucible Pocket Indexing Evaporation Source HCL系列多坩堝蒸發源

 

Features

  • Simple control characteristics
  • Reliability is high and stable
  • Range of speed control (motorized versions)
  • Long motor life
  • Computer PC controlled
  • Smaller actuator profile allows for additional source flange utilities
  • Scale for visual crucible position

特征
簡單的控制特性
可靠性高且穩定
速度控制范圍（電動版）
電機壽命長
計算機PC控制
較小的致動器輪廓允許額外的源法蘭公用設施
坩堝視覺位置刻度

Specifications?

Operating Pressure Below 5×10-5?Torr is desirable for best operation
Power Rating 6.10 or 15 kW
Filament 12 VAC 60A
Maximum Power 15 kW
Cooling Water 2gpm
Pressure Differential 25 psi minimum
Max. Bakeout Temp. 200° C
Crucible Volume 7, 10, 15, 25, 40 or 75 cc

 

Motor Stepper

Description Model No.
7 cc HCL series e-Gun, 6 kW, 3, 4, 5, or 6+ pockets HCL-0607-X-ZST-MS
10 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1010-X-ZST-MS
15 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1015-X-ZST-MS
25 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1025-X-ZST-MS
40 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1040-X-ZST-MS
75 cc HCL series e-Gun, 15 kW, 3, 4, 5, or 6+ pockets HCL-1575-X-ZST-MS

 

Manual

Description Model No.
7 cc HCL series e-Gun, 6 kW, 3, 4, 5, or 6+ pockets HCL-0607-X-ZST-M
10 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1010-X-ZST-M
15 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1015-X-ZST-M
25 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1025-X-ZST-M
40 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1040-X-ZST-M
75 cc HCL series e-Gun, 15 kW, 3, 4, 5, or 6+ pockets HCL-1575-X-ZST-M

 


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