Teflon Flow Meter For Low Flowrate Of Liquid And Gas 吹掃流量計(jì),Flucon玻璃轉(zhuǎn)子流量計(jì),Flucon流量計(jì)FW1510

Specification
– Measuring object : Gas, Liquid(viscosity < S.OcP)
-Range :Water?Min 3 LPM/ Max 5 LPM
GAS – Min 50 LPM / Max 200 LPM
– Accu『acy : ±5% full scale
– OP.Press : Max 5 kg/cm’
– OP.Temp : 0~50(90) ?c

Applications
– DI water or chemical supply linefor semiconduct
-or wet process
– Gas supply line for semiconductor equipment
-Various mate『ial of wetted parts are for types of
gas,liquid
– Small and medium size tlowmeter which can be
used with model 1530 and 2510 tlowmeter